FILM FORMING MASK DEVICE FOR PIEZOELECTRIC ELEMENT AND STORING JIG FOR PIEZOELECTRIC ELEMENT

摘要

PROBLEM TO BE SOLVED: To obtain a film forming mask device for piezoelectric element and a storing jig for piezoelectric element which improve productivity and production yield. SOLUTION: The film forming mask device consists of a first mask unit M1 and a second mask unit M2. The first mask unit M1 is constituted by diffused junction of a first mask main body 5 and a first retaining plate 6 arranged on it. The second mask unit M2 is constituted by diffused junction of a spacer 4, a second mask main body 3 arranged closely under the spacer 4, and a second retaining plate 1 arranged closely under the second mask main body.