ELECTRON BEAM IRRADIATION DEVICE

摘要

PROBLEM TO BE SOLVED: To reduce an amount of electron beams colliding against a central beam of an irradiated window among electron beams extracted from an extraction electrode. SOLUTION: An extraction electrode 20a constituting this electron beam irradiation device is provided with a plurality of metal round rod type first electrode rods 36 arranged parallelly to each other along a filament 8 and supports 26a, 26b supporting the end parts of respective first electrode rods 36. Above the first electrode rods 36, a gutter type masking plate 56 is arranged just above the central beam of an irradiated window along the central beam and across the first electrode rods 36. Inside the upper part of the masking plate 56, a plurality of second electrode rods 38 are arranged along the masking plate 56 so as to put the masking plate 56 between the first electrode rods 36 below the masking plate 56 and itself for positioning the masking plate 56. The end parts of the second electrode rods 38 are supported by the support 22.