发明名称 Semiconductor device and manufacturing method thereof
摘要 In a CMOS circuit, impurity regions are formed in the channel forming region of each of an n-channel and p-channel transistors along the channel direction. The intervals between the impurity regions in the n-channel transistor is set narrower than those between the impurity regions in the p-channel transistor so as to make the absolute values of the threshold voltages of the n-channel and p-channel transistors approximately equal to each other. Where active layers are formed by utilizing a crystal structural body that is a collection of needle-like or columnar crystals, the same effect can be attained by controlling the width of the needle-like or columnar crystals.
申请公布号 US6118148(A) 申请公布日期 2000.09.12
申请号 US19970963977 申请日期 1997.11.04
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMAZAKI, SHUNPEI
分类号 H01L27/092;H01L27/12;H01L29/04;(IPC1-7):H01L21/822 主分类号 H01L27/092
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