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发明名称
SELBSTAUSRICHTENDES IN-SITU ELLIPSOMETER UND VERFAHREN ZUR VERWENDUNG BEI PROZESSÜBERWACHUNG
摘要
申请公布号
DE69423212(T2)
申请公布日期
2000.09.07
申请号
DE19946023212T
申请日期
1994.01.14
申请人
TOKYO ELECTRON LTD., TOKIO/TOKYO
发明人
HSU, SHAOCHUNG;DE, N.;ROBISON, L.;YASAR, TUGRUL
分类号
G01B11/06;G01J4/00;G01J4/04;G01N21/21;H01L21/66;(IPC1-7):G01B11/06
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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