| 摘要 |
PROBLEM TO BE SOLVED: To provide an air conditioning device to suppress the occurrence of unevenness in temperature in a clean room and a power of a fan filter unit. SOLUTION: An air harmonizing device comprises a clean room 1 to form an air lead-in part in a ceiling part and an air lead-out part in a floor part; a ceiling space 6 formed on the ceiling part side of the clean room C an underfloor space 7 formed on the floor part side of the clean room 1: a fan filter unit 8 disposed on the ceiling part side of the clean room 1; a passage 11 to intercommunicate a ceiling space and an underfloor space; an air-conditioner 20 communicated with the passage 11 through an air lead-in port 21 and an air lead-out port 22; and a clean air blowing apparatus 23 disposed in the passage 11 in parallel to a clean room 1 through the lead-out port 22 of the air conditioner 20 and provided with a plurality of nozzles opened toward a ceiling space 6. The air-conditioner 20 injects air at a speed higher than that of circulation air through a plurality of nozzles arranged at the clean air blowing apparatus 23.
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