发明名称 |
Recessed etch RF micro-electro-mechanical switch |
摘要 |
A novel micro-electro-mechanical (MEMS) RF switch having a cavity (32) in a substrate (28) which creates a spacing between a conductive membrane (34) and a bottom electrode (38). The invention eliminates the need for the dielectric posts found in prior art MEMS RF switches, includes a flexure structure (36) in the membrane (34) which will reduce the required pull down voltage for the membrane, and reduces the stress and fatigue in the membrane due to switch activation.
|
申请公布号 |
US6100477(A) |
申请公布日期 |
2000.08.08 |
申请号 |
US19980118109 |
申请日期 |
1998.07.17 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
RANDALL, JOHN NEAL;KAO, MING-YIH |
分类号 |
H01H59/00;H01P1/12;(IPC1-7):H01H57/00 |
主分类号 |
H01H59/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|