SEMICONDUCTOR MICROVALVE AND MANUFACTURE THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor microvalve and manufacture thereof capable of a broad range of flow control and wherein a small and normally open type valve is easily formed. SOLUTION: A semiconductor substrate 1 having a through hole 1a and a projection part 1c being a valve seat provided near an opening of the through hole 1a, and a flat form flexible part 2 oppositely placed with a predetermined gap width in between a surface having the projection 1c of the semiconductor substrate 1 formed are included, and a flow control of fluid is performed by displacing the flexible part 2 for adjusting the gap width.