| 摘要 |
PROBLEM TO BE SOLVED: To accurately observe edges on the surface of a sample, and the like. SOLUTION: A scanning probe microscope comprises a probe 15 for measuring the surface of a sample 11, a tripod 12 including a scanning motion actuator and a height adjusting actuator, and a control system for keeping a constant interval between the probe and the sample by controlling movement of the height adjusting actuator utilizing a physical quantity occurring between the probe and the sample during scanning. When a set physical quantity can not be sustained between the probe and the sample, a displacement limiting section 21 limits stretching operation of the height adjusting actuator for theprobe 15 within a specified range.
|
