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发明名称
INSTALLATION WITH TRANSPORT SYSTEM
摘要
申请公布号
EP1021823(A2)
申请公布日期
2000.07.26
申请号
EP19980952508
申请日期
1998.08.27
申请人
SIEMENS AKTIENGESELLSCHAFT;ORTNER LUEFTUNGS- UND KLIMAANLAGEN GMBH
发明人
GRIESSING, JUERGEN;JARNIG, HUBERT
分类号
H01L21/677;B65G37/02;B65G49/07;H01L21/02;(IPC1-7):H01L21/00
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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