发明名称 POLISHING PAD
摘要 PROBLEM TO BE SOLVED: To make small-diameter and flat holes, heighten the hole density of the surface and obtain good thickness accuracy by making the apparent specific gravity of hollow polyester sheet under a specified value, and forming a cavity taking noncompatible thermoplastic resin not compatible with polyester as a nucleus. SOLUTION: The apparent specific gravity of a hollow polyester sheet is set under about 1.25 and a cavity is formed taking noncompatible thermoplastic resin not compatible with polyester as a nucleus. When the apparent specific gravity is not less than about 1.25, the cavity rate is under about 10%, so it is not practical. The noncompatible thermoplastic resin is used as thermoplastic resin not compatible with polyester so as to obtain a hollow polyester sheet layer which has small-diameter and flat holes and has high hole density of the surface.
申请公布号 JP2000202764(A) 申请公布日期 2000.07.25
申请号 JP19990005495 申请日期 1999.01.12
申请人 TOYOBO CO LTD 发明人 IMAGAWA HIROSHI;SASAKI YASUSHI
分类号 B24B37/20;B24B37/24;H01L21/304 主分类号 B24B37/20
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