WAFER TRANSFERRING APPARATUS

摘要

PURPOSE: A wafer transferring apparatus is provided to prevent from colliding the fork hand for charging/discharging the wafer with the edge of the wafer by forming the edge of the fork hand into slope shape. CONSTITUTION: A wafer transferring apparatus comprises a fork hand(12) for charging/discharging the wafer, and a fork body(14) for fixing the fork hand. The edge of the fork hand(12) is formed to be sloped in order to minimize the collision between the edge of the wafer and the fork hand when the wafer is charged/discharged. The fork assembly consisted on the fork hand and the fork body is used to charge/discharge the wafer in batch type LPCVD/DIFF process.