| 摘要 |
PROBLEM TO BE SOLVED: To automatically perform maintenance necessary in each treating chamber by a method, wherein a control part decides on the need for the maintenance in each treatment chamber and when the control part decides that the maintenance is necessary, the necessary maintenances are selected. SOLUTION: A device control part 6 inputs information to show the operating situations in treating chamber control parts 4A to 4D and a transfer chamber-load lock chamber control part 5 from the control parts 4A to 4D for deciding whether or not there is a need to perform maintenance in each treating chamber of treating chambers 1A to 1D, on the basis of the inputted information. When the control part 6 decides that there is a need to perform maintenance, the control part 6 selects a maintenance necessary for the treating chambers 1A to 1D to read out the treatment conditions regarding the treatment, the reads treatment order and the decision conditions from a storage part 7, and transfers the treatment conditions, the treatment order and the deciding conditions to the control parts 4A to 4D to correspond to the chambers 1A to 1D and instructs to the control parts 4A to 4D. Thereby, the control parts 4A to 4D are subjected to maintenance by actuating equipment and detecting equipment, so that they are provided in the chambers 1A to 1D to correspond to the control parts 4A to 4D.
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