METHOD FOR MANUFACTURING FLUID INJECTING APPARATUS AND FLUID INJECTING APPARATUS THEREOF

摘要

PURPOSE: A method for manufacturing a fluid injecting apparatus is provided to simplify the manufacturing process and improve the productivity by omitting the adhesive process by integrally stacking a driving part, a membrane and a nozzle part in sequence. CONSTITUTION: A method for manufacturing a fluid injecting apparatus includes the steps of forming a driving part(110) having a sacrifice layer(119), forming a membrane(120) on the driving part, forming a nozzle part(130) on a membrane, and removing the sacrifice layer, wherein the step for forming the driving part includes the sub-step of forming an electrode(113) and a heating element(112) on a board(115), stacking a driving fluid barrier layer(133) on the electrode and the heating element and forming a driving fluid chamber(131), forming a protective layer(118) on the driving fluid barrier layer and the electrode and the heating element, and forming the sacrifice layer with a same height with the driving fluid barrier layer in the driving fluid chamber.