INTEGRATED CIRCUIT INCLUDING SELF-ARRANGED HYDROGEN BARRIER LAYER AND METHOD FOR PRODUCING THEREOF

摘要

PURPOSE: An integrated circuit including self-arranged hydrogen barrier layer and a method for producing thereof to provide a hydrogen barrier layer covering a material thin layer. CONSTITUTION: An integrated circuit including self-arranged hydrogen barrier layer and a method for producing thereof include a first to a third step. The integrated circuit include an integrated circuit part with a thin membrane(124) composed of metal oxidation material. At the first step, a barrier layer(128) is formed on the thin membrane(124). At the second step, a hydrogen barrier layer(130) is formed on the barrier layer(128). At the third step, another barrier layer(132) is formed on the hydrogen barrier layer(130). An another barrier layer(132) includes an uppermost surface.