| 摘要 |
PROBLEM TO BE SOLVED: To obtain a method and an apparatus in which various defects existing on a display screen can be inspected at high speed and with high accuracy without constituting a complicated system by detecting a defect on the basis of the shade of a single composed shade image in which a plurality of shade signals in different exposure times are composed. SOLUTION: A light source 2 shines light at an object 1 to be inspected. The shade signal in every pixel of the object 1 to be inspected is obtained through a camera 3, and it is sent to a computer 4. The computer 4 controls the light source 2, and it controls the exposure time in the imaging operation of the camera 3. In the computer 4, an image memory 5 stores shade data in a form which corresponds to the row and the column of every pixel. In addition, in the computer 4, a program which executes a processing operation is set in a program memory 6. In Step 1, an image from the object to be inspected is fetched. In Step 2, shade images which are fetched in Step 1 are composed. In Step 3, a part which is changed from the neighborhood is detected with reference to the shade images obtained in Step 2. |
