发明名称 METHOD FOR CONTROLLING CARBON PROTECTION FILM THICKNESS AND DEVICE FOR CONTROLLING CARBON PROTECTIVE FILM THICKNESS
摘要 PROBLEM TO BE SOLVED: To accurately control the thickness of a carbon protective film, with a simple method. SOLUTION: When a Co-O magnetic film (metal magnetic film) 2 is previously formed on a PET base film 1 and a DLC protection film (carbon protective film) 3 is formed on the Co-O magnetic film 2, the difference in reflection factor between the Co-O magnetic film 2 and DLC protection film is measured to control the film thickness of the DLC protection film 3 to a specific thickness.
申请公布号 JP2000161925(A) 申请公布日期 2000.06.16
申请号 JP19980335476 申请日期 1998.11.26
申请人 VICTOR CO OF JAPAN LTD 发明人 KAWAI NOBORU
分类号 G11B5/84;G01B11/06;(IPC1-7):G01B11/06 主分类号 G11B5/84
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