| 摘要 |
PROBLEM TO BE SOLVED: To process a sample with superior stability and reproductivity by a method, wherein reaction sub-product formation in a vacuum container is prevented. SOLUTION: An inner wall 1A of a vacuum container 1, the surface of a sample stand 7', the surface of an electrode stand 18, and the surface of an electrode 13 are coated with, e.g. a TiO2 film (titanium dioxide film) as an optical catalytic film 14. Thus, a part of the surface of the sample 8 decomposed by plasma 9, which is a reaction product with a reactive gas 3, or the like eve reaches a part coated with the optical catalytic film 14, receives ultraviolet rays or vacuum ultraviolet rays 17 generated from the plasma 9, and is decomposed on a surface of the optical catalytic film 14.
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