发明名称 Angular velocity sensor
摘要 A downsized angular velocity sensor is disclosed in which the detection sensitivity is improved. An oscillator oscillatably supported by support beams along two horizontal axes is formed of two rod-like members extending along the Y axis and an interconnecting portion. A hollow region is formed between each of the rod-like members and the interconnecting portion. Displacement detecting sections are disposed in the hollow regions. The displacement detecting sections are each constructed of an antenna-like electrode array, so that a greater amount of change in capacitance generated between the antenna-like electrodes can be obtained.
申请公布号 US6070463(A) 申请公布日期 2000.06.06
申请号 US19970814834 申请日期 1997.03.11
申请人 MURATA MANUFACTURING CO., LTD. 发明人 MORIYA, KAZUFUMI;HASEGAWA, TOMOYASU;TAKATA, EIICHI;SHIBANO, TOMIO;OSAWA, TETSUO
分类号 G01C19/56;G01P9/04;(IPC1-7):G01P9/04;G01P3/02 主分类号 G01C19/56
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