| 摘要 |
PURPOSE: A pyroelectric device is provided to minimize the loss of heat collected in an IR absorption film by increasing efficiency for delivering heat into a dielectric film pattern while driving a device. CONSTITUTION: To produce a pyroelectric device, the front side of a dielectric film is selectively etched for a certain thickness. Then, plural grooves are formed in the front side, and plural etching stopper films(304) are formed at a certain part of the dielectric film including the inside of the groove. A thin film by a stacked structure of a first electrode(306)/infrared rays absorption film(308)/a semi-permeable film(310) is formed on the front surface of a dielectric film(300). Then, a glass(314) is attached on the thin film for polishing a metal film at a rear side of the dielectric film. Plural dielectric film patterns(300a) are formed to have second metal electrodes by removing the etching stopper film, and a semiconductor chip(400) is prepared to have plural isolation insulating films(402). Then, plural metal electrodes(404) over a specific area are formed on the semiconductor chip and at one side and on an upper surface of the isolation insulating film. Moreover, the second metal electrodes on the rear side of the dielectric film pattern and the metal electrode are flip chip bonded, and the glass attached on the thin film is removed.
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