| 摘要 |
PROBLEM TO BE SOLVED: To take a preliminary measurement and a primary measurement of a work speedily without high precision by using the light wave interferometer. SOLUTION: Laser light and white light are guided in the same interferometer booth 100. The work is installed, the laser light from a laser light source 10 is guided in, and interference fringes based upon a reference mirror 42 are detected by a CCD 74 and a personal computer 68. The attitude of the work is adjusted by setting the interference fringes to a prescribed value. Then the white light from a halogen lamp 28 is guided in, a corner cube moving base 48 is moved, and the interference fringes based upon the reference mirror 50 are detected to make the preliminary measurement of the work. The preliminary measurement and primary measurement are taken in the same interferometer booth 100, so the trouble to accustom the work to temperature is eliminated and the preliminary measurement can be taken with high precision.
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