| 摘要 |
PURPOSE: A device for forming a vacuum film is provided to miniaturize, to cheaply produce and to improve productivity. CONSTITUTION: A board(10) is lifted up to a rising position(30) by an elevator(21) in installment/extraction chambers(2,3), and the installment/extraction chamber is discharged up to a vacuum pressure from atmospheric pressure by closing inside the installment/extraction chamber while operating a heater(17). Herein, the board in which the film formation is finished is contacted with a cooler(13) by the elevator, and the elevator is elevated to give the board to a loading device at a point that it becomes a certain lower temperature. Then the board is sent out into the air since the loading device is entered after the inner part of the installment/extraction chamber is changed to the atmospheric pressure.
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