| 摘要 |
PROBLEM TO BE SOLVED: To provide a projection optical system which is primarily used for the projection transfer of a liquid crystal display device, which is sufficiently high in resolution, and which is provided with a fully wide exposure field. SOLUTION: In a projection optical system in which an image on the first face R is formed on the second face P, assuming the maximum image height is Y (mm), the maximum numerical aperture on the image side is NA, a wave length used isλ(μm), and the distance on the optical axis from the first face to the second is L (mm), each of the following conditional expressions is satisfied; Y>=53,λ/NA<=2.1, and 0.8<π×Y2×NA2/(λ2×L)<2.5. |
