| 摘要 |
PROBLEM TO BE SOLVED: To dissolve abnormal electric discharges in a very short period by a method, wherein the prescribed quantity of raw gas is introduced in pulse form, interlocking with the detecting means of abnormal electric discharge generated in plasma. SOLUTION: An abnormal discharge detector 1113 which monitors the state of discharge of plasma is connected in parallel with a bias power source 1114 to a bias power application electrode 1105 through a low-pass filter 1112. When the abnormal discharge detector 1113 detects abnormal state of the plasma discharge such as sparks, etc., a signal is quickly sent to a pulse-like gas feeding system 1115. With this signal sent from the abnormal discharge detector 1113, the air cooling valve of the pulse-like gas feeding system 1115 is made to operate. A fixed quantity of pulse-like gas is instantaneously introduced into a vacuum container 1101. As a result, plasma is maintained in a stable state for a long period, and the yield of production of a deposited film and a throughput can be improved sharply. |
