| 摘要 |
PROBLEM TO BE SOLVED: To provide a deposition apparatus which is compact and is easy in maintenance. SOLUTION: A loading chamber 1 and an unloading chamber 7, a heating chamber 3 and a third deposition chamber 6 as well as a first deposition chamber 4 and a second deposition chamber 5 are respectively disposed back to back as one set. These three sets are arranged continuously in series. A vacuum rotary chamber 10 is connected via a gate valve 2 to the first deposition chamber 4 and second deposition chamber 5 which are one end of the row. Substrates 8 for deposition held on holders 9 are transported from the first deposition chamber 4 to the rotary chamber 10, are rotated 180 deg. in the transportation direction and are carried into the second deposition chamber 5. |
