| 摘要 |
<p>PROBLEM TO BE SOLVED: To safely drive an RHEED(reflection high-energy electron diffraction) electron gun. SOLUTION: A first certain potential is applied to a filament at the startup of electron beam emission as a first stage, a resistance across the filament is measured after a certain time elapses since the application of the first certain potential as a second stage, a third stage decides to proceed to a fourth stage when the resistance is within a predetermined value range, or outputs the resistance outside when the resistance is out of the predetermined value range and thereafter stops application of the filament potential without proceeding to a next stage, and a second certain potential by which the temperature of the filament reaches a temperature over 1000 deg.C is applied to the filament and the application of the filament potential is stopped after a second certain time elapses as a fourth stage. Additionally, an electron beam emission potential is applied to the electrostatic lens and an electrostatic deflection plate as a fifth stage and thereafter, a third certain potential is applied to the filament so that the electron beam is emitted from an electron gun as a sixth stage.</p> |
