| 摘要 |
PURPOSE:To supply liquefied inactive gas to be maintained as a fine flow, by guiding the liquefied inactive gas flowing down as the fine flow to a curved pipe, whose internal wall is heated, and supplying the liquefied inactive gas into an opened vessel as the fine flow in the same direction to the moving direction of the opened vessel. CONSTITUTION:A needle valve 3 is provided to a liquefied nitrogen tank 1, and liquefied nitrogen 5 is discharged from this needle valve 3. Though the nitrogen is normally not in a stable flow, a very stalble fine flow is obtained if the liquefied nitrogen is procolated through a receiver 6 made of sintered metal. While a heater 9 is provided to a curved pipe 8 tilted in the moving direction of an opened vessel 11, and the liquefied nitrogen is allowed to flow into the opening vessel 11. |
