| 摘要 |
PURPOSE: A material is provided to produce transferring container for high purity liquid chemical and a related equipment without leaking. CONSTITUTION: A lining of a mass storing container, a mass transferring container and a related equipment for high purity liquid chemical is made by using high density polyethylene. The high density polyethylene is about 0.940 to 0.970g/cm¬3, especially 0.942 to 0.961g/cm¬3. When contacting with basic and acid high purity chemical, the polyethylene discharges small amount of ion impurities. Also, the material discharges high purity chemical from the non-pressure transferring container and is proper for producing a dipping tube and a pump delivering the chemical to a processing position.
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