| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact and precise magnetostriction detection type force sensor whose impact resistance is satisfactory. SOLUTION: A cylindrical magnetostriction element 14 and a cylindrical magnetic distortion detecting coil 16 into which the magnetostriction element is coaxially inserted are adhered and fixed to a substrate 12 with adhesive or the like, and a housing case 20 formed of a magnetic body is mounted on the substrate 12 so that the magnetostriction element 14 and the magnetostriction detecting coil 16 can be housed in an almost sealed state. A projecting part 28 to be brought into facial contact with the top end face of the magnetostriction element 14 and a spherical edge face 32 to be butted to an object to be measured are formed in the housing case 20. Thus, a compression stress is dispersed on the spherical edge face 32 of the housing case 20 so that any excess stress can not act on the magnetostriction element 14, and impact resistance can be improved. Also, the leakage of a magnetic flux can be prevented, and measuring precision can be made satisfactory. |
