| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray image with contract, even if a sample with large X-ray absorption and a sample with little X-ray absorption are inspected by a single X-ray tube. SOLUTION: Targets 14a and 14b different thickness are mounted by prescribed pitch on a target base 33 of an open transmission type X-ray tube. The target base 33 is mounted on a pole piece 10 of an X-ray tube via an O-ring, is covered with a target holder 13 from the upside, is tightened with four slide levers and is airtightened in vacuum. The target holder 13 is provided with a slide groove 35 and the target holder 13 into which the target base 33 is fitted can be moved in the direction of the slide groove 35. Electron beam from the lower side is focused in electron beam diameter by a focusing coil 8 and collides with the target 14b. X-ray is then radiated to the outside.
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