| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a notch arranging mechanism capable of shortening time required by the notch arrangement of each wafer, and of hardly staining the surface of each wafer structurally. SOLUTION: This mechanism is provided with plural sheets of plates 11 disposed vertically at specified intervals, each driving roller 15 provided for each plate 11, respectively, and provided with a tapered part for supporting a wafer, each motor 17 corresponding to each driving roller 15 and drivingly rotating the driving roller 15, and each guide roller 13 provided for each plate 11 and having a tapered part 13a for supporting the wafer together with the driving roller 15. Furthermore, the mechanism is provided with each photo-sensor 19 detecting the notch part Wn of the wafer W rotating over each plate 11, and a control part 5 receiving a signal from each photo-sensor 19, performing an notch arrangement by controlling each motor 17 so as to let each driving roller be rotated/suspended.</p> |
