| 摘要 |
PROBLEM TO BE SOLVED: To prevent the damage of an electrode by corrosion by supplying cooling water to which a pH stabilizer is added to the cutting blade part at the time of cutting a piezoelectric substrate provided with the electrode on a surface by a cutting blade. SOLUTION: A disk-like cutting blade 1 is for cutting a large plate into individual pieces. For the large plate, plural SAW filters provided with the electrode made of aluminum on the piezoelectric substrate 4 are provided on the surface. Then, cutting it by the cutting blade 1, the SAW filter is obtained. At the time of cutting, the cooling water is supplied from nozzles 9 on both sides of the cutting blade 1 and the nozzle 10 in the rotating direction to a cutting part. The cooling water is the one to which the pH stabilizer is added and the pH stabilizer to be added contains dilute sulfuric acid. Also, the water temperature of the cooling water is about 20 degrees. The lower surface of the piezoelectric substrate 4 is stuck to a planar tape 11. |
