| 摘要 |
PROBLEM TO BE SOLVED: To copy a fine pattern with considerably high position precision by controlling the instantaneous position of a mask table with a position error signal being the difference of the instantaneous position of a substrate table and a setting point. SOLUTION: The instantaneous position of a mask table 5 against a fixed reference point is measured, and the instantaneous position of a substrate table 1 against a fixed reference point is measured. The measured instantaneous position of the substrate table 1 is compared with the desired instantaneous position of the substrate table l and a position error signal on the difference of the two positions is obtained. Thus, the difference between the instantaneous position of the substrate table 1 and the desired instantaneous position is compensated by controlling the instantaneous position of the mask table 5 based on the position error signal. Thus, the disturbance of the mask table 5, which is viewed from the substrate table l, can considerably be reduced. Thus, a fine pattern can be copied with considerably high position precision.
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