| 摘要 |
A method for manufacturing a three-level infra-red bolometer having an increased fill factor comprises the steps of: preparing an active matrix level (210) including a substrate (212), a pair of connecting terminals (214) and a protective layer (216); forming a first sacrifical layer (300) including a pair of cavities on top of the active matrix level; forming a pair of bridges (240) including a conduction line (266) formed on top each thereof; forming a second sacrificial layer (310) including a pair of holes (315) on top of the bridges (240) and the first sacrificial layer (300); forming an absorption level (290) including a serpentine bolometer element surrounded by an absorber; and removing the second and the first sacrificial layers, respectively, to thereby form the three-level infra-red bolometer. |
