发明名称 SUBSTRATE HOLDER AND FORMATION OF SUBSTRATE HOLDING GROOVE OF SUBSTRATE HOLDER
摘要 <p>PROBLEM TO BE SOLVED: To prevent chipping, etc., while maintaining size precision. SOLUTION: In a 1st grinding process for a 1st groove, the groove is ground by moving a rotary grinder 21 in a 1st direction 1 wherein it faces up at 45 deg. while rotated. In a 2nd grinding process for a 2nd groove, the groove is ground by moving the rotary grinder 21 in a 2nd direction 2 wherein it faces up at 45 while rotated. In a 3rd grinding process for a projection part formed at the intersection part between the 1st and 2nd grooves, the projection part is ground by moving a rotary grinder 22 which have finder grading than the rotary grinder 21 in a 3rd direction 3 wherein it faces horizontally while rotated.</p>
申请公布号 JP2000012660(A) 申请公布日期 2000.01.14
申请号 JP19980189791 申请日期 1998.06.18
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 MATSUDA TSUGUMASA
分类号 H01L21/683;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/683
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