| 摘要 |
PROBLEM TO BE SOLVED: To provide a coaxial type vacuum arc vapor depositing source capable of generating uniform arc discharge. SOLUTION: As for this vapor deposition device 10, the inside of the main anode electrode 11 is provided with auxiliary anode electrodes 131 to 133, and, in small partitions 141 to 143 formed thereby, cathode electrode members 121 to 123 are respectively arranged. Thus, the vapor depositing materials 151 to 153 of each cathode electrode member are surrounded by the main and auxiliary anode electrodes 11 and 131 to 133, and arc discharge is uniformly generated on the outer circumferential face of the vapor depositing materials 151 to 153.
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