| 摘要 |
<p>A compact turbo-molecular pump has a relatively short axial length and yet provides sufficient evacuation and compression capabilities. The turbo-molecular pump comprises a casing (10) which contains an exhaust vane section (L1) having rotary vanes (30) on a rotor section alternating with stationary vanes (32) on a stator section. The exhaust vane section comprises an axial exhaust vane section (L1) and a radial exhaust vane section (L2) disposed downstream of the axial exhaust vane section (L1).</p> |
