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发明名称
Fotochemisches Trocken-Ätzverfahren
摘要
申请公布号
DE69229470(T2)
申请公布日期
2000.01.05
申请号
DE19926029470T
申请日期
1992.12.08
申请人
RESEARCH DEVELOPMENT CORP. OF JAPAN, TOKIO/TOKYO;NISHIZAWA, JUNICHI;KAWATETSU MINING CO., LTD.
发明人
NISHIZAWA, JUN-ICHI;YAMAMOTO, KENJI
分类号
H01L21/302;H01L21/203;H01L21/268;H01L21/306;(IPC1-7):H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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