| 摘要 |
PROBLEM TO BE SOLVED: To enable the power supply connector of a heater which serves as a heat source for heat-bonding carried out at a high temperature to be protected against damage or disconnection caused by a rise in temperature. SOLUTION: A part of a water jacket 5 provided above a ceramic heater 8 is formed protruding downwards to serve as a cooling part 5a, the cooling part 5a is made to bear against power supply connections 12, whereby the power supply connections 12 is cooled down by the water jacket 5 which is cooled down by cooling water, so that the power supply connections 12 is restrained from exceeding a prescribed temperature even if the ceramic heater 8 is used for heat-bonding of high temperature. |
