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发明名称
A THIN FILM DEPOSITION SYSTEM OF SEMICONDUCTOR DEVICE AND DEPOSITING PROCESS
摘要
申请公布号
KR100230182(B1)
申请公布日期
1999.11.15
申请号
KR19960071954
申请日期
1996.12.26
申请人
GENITECH CO., LTD.
发明人
LEE, KYU HONG;LEE, KYONG SU;KANG, WON GU;LEE, CHUN SU;KANG, SANG WON
分类号
H01L21/31;(IPC1-7):H01L21/31
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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