| 摘要 |
PROBLEM TO BE SOLVED: To obtain a limiting current-type oxygen sensor in which an irregularity in the characteristic of a sensor element is reduced and which obtains a stable characteristic. SOLUTION: In a limiting current-type oxygen sensor, the oxygen ion conduction of a solid electrolyte is used, an electrode 23 which is used to ionize oxygen is covered with a coating film 25 so as to limit the passage of oxygen gas, and a limiting current characteristic is obtained. In the limiting current-type oxygen sensor, the coating film 25 is manufactured by using a vapor deposition method in such a way that the angle in the longitudinal direction of particles in its film texture is set within ±5 deg. with reference to a preset angle. Thereby, it is possible to manufacture the limiting current-type oxygen sensor whose air permeability is stable and in which an irregularity in a characteristic is small. |
