| 摘要 |
PURPOSE:To detect a combustible gas with high sensitivity even at a low temp. of <=300 deg.C by providing a thin film of a specific titanium-tin oxide solid soln. and electrode to an insulating base plate. CONSTITUTION:The electrode 2 is provided on the front of the insulating base plate 1 which is a sintered alumina plate. The thin film 3 of the metallic oxide semiconductor is further provide by sputtering thereon and the electrode 4 for a heater is provided to the rear surface. The metallic oxide semiconductor 3 is titanium-tin oxide solid soln. semiconductor and consists of the compsn. expressed by the formula {(TixSn1-x)O2, (0<x<1)}. Sc, Al, V, Ta, etc. of tervalent or hexavalent elements or oxides of Pt, Pd, etc. may be added thereto. Since the specific titanium-tin oxide solid soln. is formed as the thin film, the gas sensor element which can detect the combustible gas with high sensitivity even at a low temp. is obtd. |
