发明名称 SPRAY MACHINING METHOD
摘要 PROBLEM TO BE SOLVED: To provide uniform element shapes by installing a sub-mask pattern in the outer periphery of a main mask pattern and spaced therefrom to prevent the spraying-back of a spraying medium. SOLUTION: In addition to a main mask pattern 2, a sub-mask pattern 8 is provided to prevent spraying. This sub-mask pattern 8 is arranged in the outer periphery of the main mask pattern 2 and spaced therefrom. Gaps Da between the main mask pattern 2 and the sub-mask pattern 8 are preferably be set substantially equal to one another in any places. Also, when the main mask pattern 2 includes a slit opening 3 inside, a width Db thereof and the gap Da are set substantially equal to each other. Thus, the spraying-back of a spraying medium can be prevented. Further, since the machined state of the element outer shape surface 7a of an element 7 becomes substantially similar to that of the element inner shape surface 7b thereof, uniform machining is performed.
申请公布号 JPH11300615(A) 申请公布日期 1999.11.02
申请号 JP19980120078 申请日期 1998.04.14
申请人 TDK CORP 发明人 SOENO KEIICHI;ICHIKAWA SHINJI;TSUNA TAKAMITSU;SATO KEIICHI
分类号 B24C1/04;H01L21/304;H01L41/09;H01L41/22;H01L41/337 主分类号 B24C1/04
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