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发明名称
METHOD OF EXPOSURE
摘要
申请公布号
KR100228570(B1)
申请公布日期
1999.11.01
申请号
KR19960009558
申请日期
1996.03.30
申请人
NIPPON ELECTRIC K.K.
发明人
YAKAYUKI, UCHIYAMA
分类号
G03F7/20;H01L21/027;(IPC1-7):H01L21/027
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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