| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heater and its manufacturing method causing no fallout and damage in peeling off a sheet from a thin green sheet, and no defect in adhering brazing filler metal to a terminal part. SOLUTION: Screen printing is applied on a location, corresponding to through-holes 9a, 9b on a surface of the second green sheet 24, and auxiliary patterns 30a, 30b are formed. The auxiliary patterns 30a, 30b are larger than opening parts of the through-holes 9a, 9b, and thickness is 15μm. A second green sheet 24 is pressed and adhered to one surface 23a of a first green sheet 23 with a heater pattern 25 printed, so as to cover the heater pattern 25, for forming a laminated body 41. Thereby, the opening parts of the through-holes 9a, 9b are covered by the auxiliary patterns 30a, 30b and then blocked. After this, a carrier sheet 32 pasted to a back surface of the second green sheet 24 is peeled off.
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