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发明名称
HIGH-FREQUENCY POWER SOURCE
摘要
申请公布号
JPH11262276(A)
申请公布日期
1999.09.24
申请号
JP19980080247
申请日期
1998.03.12
申请人
JEOL LTD
发明人
KATO TSUTOMU
分类号
H05H1/46;C23C16/50;H01L21/205;H02M9/00;(IPC1-7):H02M9/00
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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