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发明名称
PLATING APPARATUS
摘要
申请公布号
JPH11246980(A)
申请公布日期
1999.09.14
申请号
JP19980069351
申请日期
1998.03.04
申请人
EBARA CORP
发明人
HONGO AKIHISA;SUZUKI KENICHI;GOTO MASANORI;KA AKIHIRO
分类号
C23C18/31;H01L21/288;(IPC1-7):C23C18/31
主分类号
C23C18/31
代理机构
代理人
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