发明名称 NON-CONTACT SYSTEM FOR MEASURING FILM THICKNESS
摘要 <p>Thickness of a film in a sample may be detected by directing pump laser pulses to the surface of a sample to generate an acoustic pulse in a sample. The acoustic pulse propagates downwards until it reaches an interface between the bottom of the film and a substrate and is reflected back to the top surface of the film as a first echo. A reflection of the first echo propagates downwards and is again reflected back towards the surface as a second echo. Interferometry is used to measure the lapse of time between the first and second echos from which the thickness of the film may be determined.</p>
申请公布号 WO1999044052(A1) 申请公布日期 1999.09.02
申请号 US1999002650 申请日期 1999.02.08
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