METHOD OF REMOVING Ti FILM AND APPARATUS THEREFOR

摘要

An alkali hydroxide aqueous solution (20) is contained in a bath (1). An electrode (5) is disposed in the bath (1), and a member (11) coated with a Ti film is so disposed as to be surrounded by the electrode (5). A power supply (6) applies a negative potential to the electrode (5) and a positive potential to the member (11) to allow a current to flow between the electrode (5) and member (11) immersed in the solution (20). The Ti film is chemically removed by the solution (20).