Process to improve dishing resistance,申请号EP19980118245-传众专利搜索

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发明名称	Process to improve dishing resistance
摘要
申请公布号	EP0905755(A3)	申请公布日期	1999.08.18
申请号	EP19980118245	申请日期	1998.09.25
申请人	SIEMENS AKTIENGESELLSCHAFT	发明人	HUCKELS, KAI;ILG, MATTHIAS
分类号	H01L21/3205;H01L21/304;H01L21/3105;H01L21/321;(IPC1-7):H01L21/310	主分类号	H01L21/3205
代理机构		代理人
主权项
地址

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