POSITION MEASUREMENT METHOD AND EXPOSURE METHOD USING THE SAME

摘要

PROBLEM TO BE SOLVED: To reduce influence of low frequency noise and system noise by carrying out coordination so that the sum of the distance between a reference pattern and a measurement signal selected from a pattern of a measurement signal gets an extreme value by a time normalization matching method. SOLUTION: The number of data constituting a reference pattern is J (J is an integer exceeding 2) and continuous I (I is an integer exceeding 2) data are extracted from the (p)th ((p) is an integer exceeding 1) data in a pattern of a measurement signal thereof. I data extracted from a measurement signal pattern from detection objects 22X, 24X are coordinated to J data constituting the reference pattern. The distance is obtained for each pair of the coordinated data and coordination is performed for J data and I data so that the sum of a distance of J pairs or I pairs gets an extreme value. The position of the detection objects 22X, 24X is obtained from a value of (p) whereat the sum of the distance gets a maximum value and a minimum value.